We have successfully deposited Fe4N thin films with (111) out-of-plane orientation on thermally oxidized Si substrates using a facing-target-sputtering system. A Ta/Ru composite buffer layer was adopted to improve the (111) orientation of the Fe4N thin films. The N2 partial pressure and substrate temperature during sputtering were optimized to promote the formation of the Fe4N phase. https://www.diegojavierfares.com/special-offer-Salvation-Vinyl-LP-great-price/